IP Library › Granted Patent US 6,797,539
Granted Patent Utility
US 6,797,539 · App. 10/439,110

Method of manufacturing a semiconductor device

Inventors: Tsutomu Wada, Masachika Masuda
Patented Case View Patent ↗
Granted: Sep 28, 2004 Filed: May 16, 2003
Inventors
Tsutomu Wada
Masachika Masuda
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.

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Quick Facts
Patent No.
US 6,797,539
App. No.
10/439,110
Filed
2003-05-16
Granted
2004-09-28
Kind
B2