Granted Patent
Utility
US 6,797,613 · App. 10/196,698
Process for depositing WSix layers on a high topography with a defined stoichiometry
Inventors:
Bernhard Sell, Annette Sanger, Georg Schulze-Icking
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Jul 16, 2002
Inventors
Bernhard Sell
Annette Sanger
Georg Schulze-Icking
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.