Granted Patent
Utility
US 6,797,617 · App. 10/441,642
Reduced cross-contamination between chambers in a semiconductor processing tool
Inventors:
Christophe Pomarede, Eric James Shero, Olli Jylhä
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: May 20, 2003
Inventors
Christophe Pomarede
Eric James Shero
Olli Jylhä
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.