Granted Patent
Utility
US 6,797,621 · App. 09/801,804
Etchant composition for molybdenum and method of using same
Inventors:
Hyung-Soo Song, Ky-Sub Kim, Min Choon Park, Sok-Joo Lee
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Mar 9, 2001
Inventors
Hyung-Soo Song
Ky-Sub Kim
Min Choon Park
Sok-Joo Lee
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.