IP Library › Granted Patent US 6,797,952
Granted Patent Utility
US 6,797,952 · App. 10/205,919

Scanning atom probe

Inventors: Takashi Kaito, Osamu Nishikawa, Takaya Yagyu
Patented Case View Patent ↗
Granted: Sep 28, 2004 Filed: Jul 26, 2002
Inventors
Takashi Kaito
Osamu Nishikawa
Takaya Yagyu
Assignees (at issue)
SII NanoTechnology Inc.
KANAZAWA INSTITUTE OF TECHNOLOGY

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Quick Facts
Patent No.
US 6,797,952
App. No.
10/205,919
Filed
2002-07-26
Granted
2004-09-28
Kind
B2