Granted Patent
Utility
US 6,797,953 · App. 10/081,247
Electron beam system using multiple electron beams
Inventors:
Robert L. Gerlach, Paul P. Tesch, Walter Skoczylas
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Feb 22, 2002
Inventors
Robert L. Gerlach
Paul P. Tesch
Walter Skoczylas
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.