Granted Patent
Utility
US 6,797,969 · App. 09/781,125
Multi-column FIB for nanofabrication applications
Inventors:
Robert L. Gerlach, Paul P. Tesch, Lynwood W. Swanson, Mark W. Utlaut
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Feb 8, 2001
Inventors
Robert L. Gerlach
Paul P. Tesch
Lynwood W. Swanson
Mark W. Utlaut
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.