Granted Patent
Utility
US 6,798,488 · App. 10/253,098
Method and apparatus for fabricating liquid crystal display device using an electrostatic chuck
Inventors:
Satoshi Murata, Hiroyuki Sugimura, Norimichi Nakayama
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Sep 24, 2002
Inventors
Satoshi Murata
Hiroyuki Sugimura
Norimichi Nakayama
Assignee (at issue)
FUJITSU DISPLAY TECHNOLOGIES CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.