Granted Patent
Utility
US 6,798,494 · App. 09/944,391
Apparatus for generating partially coherent radiation
Inventor:
Patrick P. Naulleau
Patented Case
View Patent ↗
Granted: Sep 28, 2004
Filed: Aug 30, 2001
Inventor
Patrick P. Naulleau
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.