Granted Patent
Utility
US 6,799,588 · App. 10/031,923
Apparatus for treating substrates
Inventors:
Ulrich Speh, Jens Schneider, Marc Meuris
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Apr 17, 2002
Inventors
Ulrich Speh
Jens Schneider
Marc Meuris
Assignee (at issue)
Steag Micro Tech GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.