Granted Patent
Utility
US 6,800,210 · App. 10/154,150
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
Inventors:
Satyadev Patel, Andrew Huibers, Gregory P. Schaadt, Peter Heureux
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: May 22, 2002
Inventors
Satyadev Patel
Andrew Huibers
Gregory P. Schaadt
Peter Heureux
Assignee (at issue)
Reflectivity, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.