Granted Patent
Utility
US 6,800,402 · App. 10/061,283
Phase-shifting mask and method of forming pattern using the same
Inventor:
Masashi Fujimoto
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Feb 4, 2002
Inventor
Masashi Fujimoto
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.