Granted Patent
Utility
US 6,800,403 · App. 10/175,367
Techniques to characterize iso-dense effects for microdevice manufacture
Inventors:
Pierre Leroux, David Ziger
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Jun 18, 2002
Inventors
Pierre Leroux
David Ziger
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.