Granted Patent
Utility
US 6,800,407 · App. 10/135,684
Method for experimentally verifying imaging errors in photomasks
Inventors:
Gunther Czech, Ernst-Christian Richter, Ulrich Scheler, Michael Sebald
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Apr 30, 2002
Inventors
Gunther Czech
Ernst-Christian Richter
Ulrich Scheler
Michael Sebald
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.