IP Library › Granted Patent US 6,800,416
Granted Patent Utility
US 6,800,416 · App. 10/042,531

Negative deep ultraviolet photoresist

Inventors: Takanori Kudo, Munirathna Padmanaban, Ralph R. Dammel, Medhat A. Touky
Patented Case View Patent ↗
Granted: Oct 5, 2004 Filed: Jan 9, 2002
Inventors
Takanori Kudo
Munirathna Padmanaban
Ralph R. Dammel
Medhat A. Touky
Assignee (at issue)
Clariant Finance (BVI) Limited

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Quick Facts
Patent No.
US 6,800,416
App. No.
10/042,531
Filed
2002-01-09
Granted
2004-10-05
Kind
B2