Granted Patent
Utility
US 6,800,494 · App. 10/150,320
Method and apparatus for controlling copper barrier/seed deposition processes
Inventors:
Howard E. Castle, William S. Brennan
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: May 17, 2002
Inventors
Howard E. Castle
William S. Brennan
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.