Granted Patent
Utility
US 6,800,852 · App. 10/330,383
Nondestructive characterization of thin films using measured basis spectra
Inventors:
Paul E. Larson, David G. Watson, John F. Moulder
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Dec 27, 2002
Inventors
Paul E. Larson
David G. Watson
John F. Moulder
Assignee (at issue)
ReVera, Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.