IP Library › Granted Patent US 6,800,937
Granted Patent Utility
US 6,800,937 · App. 10/075,863

RuSixOy-containing adhesion layers and process for fabricating the same

Inventors: Eugene P. Marsh, Brenda D. Kraus
Patented Case View Patent ↗
Granted: Oct 5, 2004 Filed: Feb 12, 2002
Inventors
Eugene P. Marsh
Brenda D. Kraus
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,800,937
App. No.
10/075,863
Filed
2002-02-12
Granted
2004-10-05
Kind
B2