IP Library › Granted Patent US 6,801,299
Granted Patent Utility
US 6,801,299 · App. 10/208,046

System for laser beam expansion without expanding spatial coherence

Inventors: Alexander Kremer, Stanley Drazkiewicz
Patented Case View Patent ↗
Granted: Oct 5, 2004 Filed: Jul 31, 2002
Inventors
Alexander Kremer
Stanley Drazkiewicz
Assignee (at issue)
ASML Holding N.V.

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Quick Facts
Patent No.
US 6,801,299
App. No.
10/208,046
Filed
2002-07-31
Granted
2004-10-05
Kind
B2