Granted Patent
Utility
US 6,801,313 · App. 09/627,456
Overlay mark, method of measuring overlay accuracy, method of making alignment and semiconductor device therewith
Inventor:
Kazuki Yokota
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Jul 27, 2000
Inventor
Kazuki Yokota
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.