Granted Patent
Utility
US 6,801,321 · App. 09/762,473
Method and apparatus for measuring lateral variations in thickness or refractive index of a transparent film on a substrate
Inventor:
Ofer Du-Nour
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Feb 7, 2001
Inventor
Ofer Du-Nour
Assignee (at issue)
Tevet Process Control Technologies Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.