Granted Patent
Utility
US 6,801,323 · App. 10/272,168
Methods and apparatus for interferometric dimensional metrology
Inventor:
Christopher J. Evans
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Oct 16, 2002
Inventor
Christopher J. Evans
Assignee (at issue)
Zygo Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.