Granted Patent
Utility
US 6,801,560 · App. 10/056,619
Line selected F2 two chamber laser system
Inventors:
David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels, Herve A. Besaucele, David W. Myers, Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Richard C. Ujazdowski, Richard M. Ness, Scott T. Smith, William G. Hulburd
Patented Case
View Patent ↗
Granted: Oct 5, 2004
Filed: Jan 23, 2002
Inventors
David S. Knowles
Daniel J. W. Brown
Richard L. Sandstrom
German E. Rylov
Eckehard D. Onkels
Herve A. Besaucele
David W. Myers
Alexander I. Ershov
William N. Partlo
Igor V. Fomenkov
Richard C. Ujazdowski
Richard M. Ness
Scott T. Smith
William G. Hulburd
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.