IP Library › Granted Patent US 6,802,950
Granted Patent Utility
US 6,802,950 · App. 10/304,175

Apparatus and method for controlling plating uniformity

Inventors: John T. Hachman, James J. Kelly, Alan C. West
Patented Case View Patent ↗
Granted: Oct 12, 2004 Filed: Nov 26, 2002
Inventors
John T. Hachman
James J. Kelly
Alan C. West
Assignee (at issue)
Sandia National Laboratory

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Quick Facts
Patent No.
US 6,802,950
App. No.
10/304,175
Filed
2002-11-26
Granted
2004-10-12
Kind
B2