Granted Patent
Utility
US 6,803,156 · App. 09/920,504
Electrostatic damage (ESD) protected photomask
Inventor:
Shahzad Akbar
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Aug 1, 2001
Inventor
Shahzad Akbar
Assignee (at issue)
Infineon Technologies Richmond, LP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.