Granted Patent
Utility
US 6,803,243 · App. 10/003,331
Low temperature formation of backside ohmic contacts for vertical devices
Inventors:
David B. Slater, Jr., Alexander Suvorov
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Oct 31, 2001
Inventors
David B. Slater, Jr.
Alexander Suvorov
Assignee (at issue)
Cree, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.