Granted Patent
Utility
US 6,803,271 · App. 10/187,003
Method for manufacturing semiconductor integrated circuit device
Inventors:
Tsuyoshi Fujiwara, Katsuyuki Asaka, Yasuhiro Nariyoshi, Yoshinori Hoshino, Kazutoshi Oomori
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Jul 2, 2002
Inventors
Tsuyoshi Fujiwara
Katsuyuki Asaka
Yasuhiro Nariyoshi
Yoshinori Hoshino
Kazutoshi Oomori
Assignees (at issue)
Renesas Technology Corporation
Hitachi Tohbu Semiconductor, Ltd.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.