IP Library › Granted Patent US 6,803,353
Granted Patent Utility
US 6,803,353 · App. 10/685,730

Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents

Inventors: Nicholas M. Martyak, Glenn T. Carroll
Patented Case View Patent ↗
Granted: Oct 12, 2004 Filed: Oct 14, 2003
Inventors
Nicholas M. Martyak
Glenn T. Carroll
Assignee (at issue)
ATOFINA Chemicals, Inc.

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Quick Facts
Patent No.
US 6,803,353
App. No.
10/685,730
Filed
2003-10-14
Granted
2004-10-12
Kind
B2