IP Library › Granted Patent US 6,803,547
Granted Patent Utility
US 6,803,547 · App. 10/108,190

Apparatus for and method of heating semiconductor devices

Inventors: Tohru Tanaka, Yasuhisa Kitajima
Patented Case View Patent ↗
Granted: Oct 12, 2004 Filed: Mar 27, 2002
Inventors
Tohru Tanaka
Yasuhisa Kitajima
Assignee (at issue)
Ando Electric Co., Ltd.

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Quick Facts
Patent No.
US 6,803,547
App. No.
10/108,190
Filed
2002-03-27
Granted
2004-10-12
Kind
B2