Granted Patent
Utility
US 6,803,576 · App. 10/252,479
Analytical method to measure nitrogen concentration in single crystal silicon
Inventors:
Maria Giovanna Pretto, Maria Porrini, Roberto Scala, Vladimir V. Voronkov, Paolo Collareta, Robert J. Falster
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Sep 23, 2002
Inventors
Maria Giovanna Pretto
Maria Porrini
Roberto Scala
Vladimir V. Voronkov
Paolo Collareta
Robert J. Falster
Assignee (at issue)
MEMC Electronic Materials S.P.A.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.