Granted Patent
Utility
US 6,804,288 · App. 10/422,304
Electron beam exposure apparatus and electron beam deflection apparatus
Inventor:
Takeshi Haraguchi
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Apr 23, 2003
Inventor
Takeshi Haraguchi
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.