Granted Patent
Utility
US 6,804,327 · App. 10/109,581
Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
Inventors:
Guido Schriever, Ulrich Rebhan
Patented Case
View Patent ↗
Granted: Oct 12, 2004
Filed: Mar 27, 2002
Inventors
Guido Schriever
Ulrich Rebhan
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.