IP Library › Granted Patent US 6,805,769
Granted Patent Utility
US 6,805,769 · App. 09/973,182

Substrate processing apparatus

Inventors: Seiichiro Okuda, Hiroaki Sugimoto
Patented Case View Patent ↗
Granted: Oct 19, 2004 Filed: Oct 10, 2001
Inventors
Seiichiro Okuda
Hiroaki Sugimoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 6,805,769
App. No.
09/973,182
Filed
2001-10-10
Granted
2004-10-19
Kind
B2