Granted Patent
Utility
US 6,805,812 · App. 09/975,335
Phosphono compound-containing polishing composition and method of using same
Inventor:
Mingming Fang
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: Oct 11, 2001
Inventor
Mingming Fang
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.