Granted Patent
Utility
US 6,806,182 · App. 10/137,274
Method for eliminating via resistance shift in organic ILD
Inventors:
Darryl D. Restaino, Shahab Siddiqui, Erdem Kaltalioglu, Delores Bennett, Chih-Chih Liu, Hsueh-Chung Chen, Tong-Yu Chen, Gwo-Shii Yang, Chiung-Sheng Hsiung
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: May 1, 2002
Inventors
Darryl D. Restaino
Shahab Siddiqui
Erdem Kaltalioglu
Delores Bennett
Chih-Chih Liu
Hsueh-Chung Chen
Tong-Yu Chen
Gwo-Shii Yang
Chiung-Sheng Hsiung
Assignees (at issue)
International Business Machines Corporation
Infineon Technologies AG
WINBOND ELECTRONICS CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.