Granted Patent
Utility
US 6,806,573 · App. 09/826,661
Low angle, low energy physical vapor deposition of alloys
Inventor:
Yongjun Jeff Hu
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: Apr 5, 2001
Inventor
Yongjun Jeff Hu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.