Granted Patent
Utility
US 6,806,942 · App. 10/434,952
Projection exposure system
Inventors:
Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer, Alexander Epple, Helmut Beierl, Reiner Garreis
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: May 8, 2003
Inventors
Karl-Heinz Schuster
Wilhelm Ulrich
Toralf Gruner
Daniel Kraehmer
Wolfgang Singer
Alexander Epple
Helmut Beierl
Reiner Garreis
Assignee (at issue)
Carl Zeiss SMT GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.