Granted Patent
Utility
US 6,806,971 · App. 10/155,236
Method and apparatus for process control in semiconductor manufacture
Inventor:
Moshe Finarov
Patented Case
View Patent ↗
Granted: Oct 19, 2004
Filed: May 28, 2002
Inventor
Moshe Finarov
Assignee (at issue)
NOVA MEASURING INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.