Granted Patent
Utility
US 6,808,952 · App. 10/236,631
Process for fabricating a microelectromechanical structure
Inventors:
Jeffry J. Sniegowski, Thomas W. Krygowski, Seethambal S. Mani, Scott D. Habermehl, Dale L. Hetherington, James E. Stevens, Paul J. Resnick, Steven R. Volk
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Sep 5, 2002
Inventors
Jeffry J. Sniegowski
Thomas W. Krygowski
Seethambal S. Mani
Scott D. Habermehl
Dale L. Hetherington
James E. Stevens
Paul J. Resnick
Steven R. Volk
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.