Granted Patent
Utility
US 6,809,033 · App. 10/045,354
Innovative method of hard mask removal
Inventors:
Angela T. Hui, Jusuke Ogura
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Nov 7, 2001
Inventors
Angela T. Hui
Jusuke Ogura
Assignee (at issue)
FASL LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.