Granted Patent
Utility
US 6,809,510 · App. 10/015,150
Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell
Inventor:
Michael B. Goetzke
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Nov 7, 2001
Inventor
Michael B. Goetzke
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.