Granted Patent
Utility
US 6,809,532 · App. 10/063,869
Inspection method and inspection apparatus for semiconductor circuit
Inventor:
Chihiro Araki
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: May 21, 2002
Inventor
Chihiro Araki
Assignee (at issue)
KABUSHIKI KAISHA TOP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.