IP Library › Granted Patent US 6,809,800
Granted Patent Utility
US 6,809,800 · App. 10/424,039

Apparatus for patterning a semiconductor wafer

Inventors: Oliver Genz, Jurgen Preuninger, Gerhard Kunkel
Patented Case View Patent ↗
Granted: Oct 26, 2004 Filed: Apr 25, 2003
Inventors
Oliver Genz
Jurgen Preuninger
Gerhard Kunkel
Assignee (at issue)
Infineon Technologies AG

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Quick Facts
Patent No.
US 6,809,800
App. No.
10/424,039
Filed
2003-04-25
Granted
2004-10-26
Kind
B2