Granted Patent
Utility
US 6,809,809 · App. 10/379,016
Optical method and apparatus for inspecting large area planar objects
Inventors:
Patrick Kinney, Anand Gupta, Nagaraja Rao
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Mar 4, 2003
Inventors
Patrick Kinney
Anand Gupta
Nagaraja Rao
Assignee (at issue)
Real Time Metrology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.