Granted Patent
Utility
US 6,809,918 · App. 10/735,897
Method for improved processing and etchback of a container capacitor
Inventor:
Robert K. Carstensen
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Dec 16, 2003
Inventor
Robert K. Carstensen
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.