Granted Patent
Utility
US 6,810,106 · App. 09/916,519
X-ray fluorescence thickness measurement device
Inventor:
Masao Sato
Patented Case
View Patent ↗
Granted: Oct 26, 2004
Filed: Jul 27, 2001
Inventor
Masao Sato
Assignee (at issue)
SII NanoTechnology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.