Granted Patent
Utility
US 6,811,029 · App. 10/293,210
Wafer support attachment for a semi-conductor wafer transport container
Inventor:
Shawn D. Eggum
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Nov 13, 2002
Inventor
Shawn D. Eggum
Assignee (at issue)
ENTEGRIS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.