Granted Patent
Utility
US 6,811,474 · App. 10/199,704
Polishing composition containing conducting polymer
Inventors:
Isaac K. Cherian, Jian Zhang, Fred Sun, Shumin Wang, Eric Howard Klingenberg
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Jul 19, 2002
Inventors
Isaac K. Cherian
Jian Zhang
Fred Sun
Shumin Wang
Eric Howard Klingenberg
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.