Granted Patent
Utility
US 6,811,935 · App. 10/235,458
Phase shift mask layout process for patterns including intersecting line segments
Inventor:
Christophe Pierrat
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Sep 5, 2002
Inventor
Christophe Pierrat
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.