IP Library › Granted Patent US 6,812,147
Granted Patent Utility
US 6,812,147 · App. 10/269,605

GCIB processing to improve interconnection vias and improved interconnection via

Inventors: Wesley Skinner, John Hautala
Patented Case View Patent ↗
Granted: Nov 2, 2004 Filed: Oct 11, 2002
Inventors
Wesley Skinner
John Hautala
Assignee (at issue)
Epion Corporation

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Quick Facts
Patent No.
US 6,812,147
App. No.
10/269,605
Filed
2002-10-11
Granted
2004-11-02
Kind
B2